Omron MEMS Flow Sensors D6F Series
Omron's D6F Series MEMS flow sensors offer highly accurate mass flow measurement, capable of detecting minute airflow changes with exceptional precision. These sensors are designed to measure mass flow independently of temperature and pressure, making them ideal for applications requiring precise gas control, such as combustion optimization and HVAC systems. Key advantages include high sensitivity, dust resistance through a built-in segregation system, compact design, and energy-saving operation. The D6F series provides reliable performance across a wide range of applications, including industrial equipment, environmental monitoring, and energy management.
Product Attributes
- Brand: Omron
- Technology: MEMS
- Certifications: RoHS Compliant
Technical Specifications
| Model | Applicable gas | Shape | Flow rate range (L/min) | Flow velocity range (m/s) | Differential pressure range (Pa) | Page |
| D6F-P0001A1 | Air | Minute to middle flow | 00.1 | - | - | 5 |
| D6F-P0010A | Air | Minute to middle flow | 01 | - | - | 5 |
| D6F-01A1-110 | Air | Minute flow | 01 | - | - | 8, 9 |
| D6F-02A1-110 | Air | Minute flow | 02 | - | - | 8, 9 |
| D6F-03A3-000 | Air | Minute to middle flow | 03 | - | - | 5 |
| D6F-10A5-000 | Air | Middle to high flow | 010 | - | - | 6 |
| D6F-10A6-000 | Air | Middle to high flow | 010 | - | - | 6 |
| D6F-10A7-000 | Air | Middle to high flow | 010 | - | - | 6 |
| D6F-10A7D-000 | Air | Middle to high flow | 010 | - | - | 6 |
| D6F-20A5-000 | Air | Middle to high flow | 020 | - | - | 6 |
| D6F-20A6-000 | Air | Middle to high flow | 020 | - | - | 6 |
| D6F-20A7D-000 | Air | Middle to high flow | 020 | - | - | 6 |
| D6F-30A7-000 | Air | Middle to high flow | 030 | - | - | 14, 16, 18, 20 |
| D6F-30AB71-000 | Air | Middle to high flow | 030 | - | - | 14, 16, 20 |
| D6F-50A5-000 | Air | Middle to high flow | 050 | - | - | 6 |
| D6F-50A6-000 | Air | Middle to high flow | 050 | - | - | 6 |
| D6F-50A7D-000 | Air | Middle to high flow | 050 | - | - | 6 |
| D6F-70AB71-000 | Air | Middle to high flow | 070 | - | - | 14, 16, 18, 20 |
| D6F-70AB71D-000 | Air | Middle to high flow | 070 | - | - | 14, 16, 20 |
| D6F-01N2-000 | Natural gas (13A), LP gas | - | 01 | - | - | 5 |
| D6F-02L2-000 | Natural gas (13A), LP gas | - | 02 | - | - | 4 |
| D6F-02L7-000 | Natural gas (13A), LP gas | - | 02 | - | - | 3, 4 |
| D6F-05N2-000 | Natural gas (13A), LP gas | - | 05 | - | - | 2 |
| D6F-05N7-000 | Natural gas (13A), LP gas | - | 05 | - | - | 1, 2 |
| D6F-W01A1 | Air | Flow velocity | - | 01 | - | 34 |
| D6F-W04A1 | Air | Flow velocity | - | 04 | - | 34 |
| D6F-W10A1 | Air | Flow velocity | - | 010 | - | 34 |
| D6F-V03A1 | Air | Flow velocity | - | 03 | - | 36 |
| D6F-PH0025AD1 | Air | Differential pressure | - | - | 0250 | 8 |
| D6F-PH0025AD2 | Air | Differential pressure | - | - | 0250 | 8 |
| D6F-PH0025AMD2 | Air | Differential pressure | - | - | 0250 | 8 |
| D6F-PH0505AD3 | Air | Differential pressure | - | - | -500500 | 7 |
| D6F-PH0505AD4 | Air | Differential pressure | - | - | -500500 | 7 |
| D6F-PH0505AMD4 | Air | Differential pressure | - | - | -500500 | 7 |
| D6F-PH5050AD3 | Air | Differential pressure | - | - | -5050 | 8 |
| D6F-PH5050AD4 | Air | Differential pressure | - | - | -5050 | 8 |
| D6F-PH5050AMD4 | Air | Differential pressure | - | - | -5050 | 8 |
| D6F-A1 | Air | - | 01 | - | - | 9 |
| D6F-A3 | Air | - | 03 | - | - | 5 |
| D6F-A5/-A6/-A7/-A7D | Air | - | 010 | - | - | 6 |
| D6F-AB71/-AB71D | Air | - | 030 | - | - | 6 |
| D6F-W | Air | Flow velocity | - | - | - | 34 |
| D6F-V | Air | Flow velocity | - | - | - | 36 |
| D6F-P | Air | Flow rate | - | - | - | 4 |
| D6F-PH | Air | Differential pressure | - | - | - | 7, 8 |
| D6F-N2/-L2 | Natural gas, LP gas | - | - | - | - | - |
| D6F-N7/-L7 | Natural gas, LP gas | - | - | - | - | - |
2411220210_OMRON-D6F-PH5050AMD4_C3263507.pdf
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